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Description: A holder to be used for lithography process
Project views: 135
Project status: New Now accepting: Fabrication bids
Design Type-Tier: technical-silver
Design Price: US$100.00 | Payment Pending
Fabrication Price: Payment Pending
Order Number: 20160610191636-481-01-0
Additional Information: A wafer-shaped holder with diameter of 100mm and thickness less than 1mm. On the surface there should be array of cuboid wells 4.25mm*3.76mm with a depth of 0.254mm. The tolerance for the wells should be less than 20um. For material selection, it should stand 200-300 degree C of temperature, and chemically stable in photoresist (Shipley series and SU8) and various solutions such as IPA, acetone, TMAH and NMP. Some machines it might go through include ebeam deposition, sputtering and hot plate.
Updated 3321d ago on:
10 Jun 2016 at 19:16:36
You3Dit Inc.
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